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Dynamics of particulates in the afterglow of a radio frequency excited plasma
Yeon, Chung-KyuVolume:
13
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.579853
Date:
May, 1995
File:
PDF, 486 KB
english, 1995