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Effect of changing the electrode gap on the spatial and electrical properties of O[sub 2]/CF[sub 4] plasmas
Steffens, Kristen L., Sobolewski, Mark A.Volume:
21
Year:
2003
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1531142
File:
PDF, 560 KB
english, 2003