[IEEE 13th International Symposium on the Physical and Failure Analysis of Integrated Circuits - Singapore (2006.7.3-2006.7.3)] 13th International Symposium on the Physical and Failure Analysis of Integrated Circuits - The Scanning Confocal Electron Microscope: A New Tool for Defect Studies in Semiconductor Devices
Zaluzec, NestorYear:
2006
Language:
english
DOI:
10.1109/ipfa.2006.250995
File:
PDF, 3.81 MB
english, 2006