[IEEE IEEE Custom Integrated Circuits Conference - Boston,...

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[IEEE IEEE Custom Integrated Circuits Conference - Boston, MA, USA (13-16 May 1990)] IEEE Proceedings of the Custom Integrated Circuits Conference - A laser direct write double-level-metal technology for rapid fabrication

Fu, C.Y., Law, B., Hsu, R., Raley, N.F., Malba, V., Hills, R., Lai, C.
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Year:
1990
Language:
english
DOI:
10.1109/cicc.1990.124767
File:
PDF, 392 KB
english, 1990
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