Reliability-based analysis and design optimization of electrostatically actuated MEMS
Matthew Allen, Michael Raulli, Kurt Maute, Dan M. FrangopolVolume:
82
Year:
2004
Language:
english
Pages:
14
Journal:
Computers & Structures
DOI:
10.1016/j.compstruc.2004.03.009
File:
PDF, 626 KB
english, 2004