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Fabrication of stationary micro-optical shutter based on semiconductor-to-metallic phase transition of W-doped VO[sub 2] active layer driven by an external voltage
Soltani, M., Chaker, M., Haddad, E., Kruzelecky, R., Margot, J., Laou, P., Paradis, S.Volume:
26
Year:
2008
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.2870227
File:
PDF, 578 KB
english, 2008