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[IEEE 1994 IEEE International Electron Devices Meeting - San Francisco, CA, USA (11-14 Dec. 1994)] Proceedings of 1994 IEEE International Electron Devices Meeting - Impact of post processing damage on the performance of high dielectric constant PLZT thin film capacitors for ULSI DRAM applications
Khamankar, R., Jiyoung Kim,, Bo Jiang,, Sudhama, C., Maniar, P., Moazzami, R., Jones, R., Lee, J.Year:
1994
Language:
english
DOI:
10.1109/iedm.1994.383399
File:
PDF, 400 KB
english, 1994