A novel vertical bottom-gate polysilicon thin film...

IEEE Electron Device Letters 1996 / 05 Vol. 17; Iss. 5

A novel vertical bottom-gate polysilicon thin film transistor with self-aligned offset

Chao Sung Lai,, Chung Len Lee,, Tan Fu Lei,, Horng Nan Chern,
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Volume:
17
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/55.491828
Date:
May, 1996
File:
PDF, 249 KB
english, 1996
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