/(001)Si interface roughness using high-resolution...

/(001)Si interface roughness using high-resolution transmission electron microscopy and simulation

Akatsu, Hiroyuki, Sumi, Yasuyuki, Ohdomari, Iwao
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Volume:
44
Language:
english
Journal:
Physical Review B
DOI:
10.1103/physrevb.44.1616
Date:
July, 1991
File:
PDF, 722 KB
english, 1991
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