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[ECS 213th ECS Meeting - Phoenix, AZ (May 18 - May 23, 2008)] ECS Transactions - Key Process Technologies for Fabrication of Sub-15nm FinFET and Reduction of Its Parasitic Resistance
Kawasaki, HirohisaVolume:
13
Year:
2008
Language:
english
DOI:
10.1149/1.2911502
File:
PDF, 2.30 MB
english, 2008