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[IEEE 2007 Digest of papers Microprocesses and Nanotechnology - Kyoto, Japan (2007.11.5-2007.11.8)] 2007 Digest of papers Microprocesses and Nanotechnology - Results from Alpha Demo and an update on the realization of EUV lithography
Harned, Noreen, Meiling, Hans, Mickan, Uwe, Zimmerman, JohnYear:
2007
Language:
english
DOI:
10.1109/imnc.2007.4456088
File:
PDF, 472 KB
english, 2007