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[IEEE ICVC'99. 6th International Conference on VLSI and CAD - Seoul, South Korea (26-27 Oct. 1999)] ICVC '99. 6th International Conference on VLSI and CAD (Cat. No.99EX361) - Evaluation of plasma-induced charging damage on metal contact process
Kyoung-Sub Shin,, Ji-Soo Kim,, Wan-Jae Park,, Chang-Jin Kang,, Tae-Hyuk Ahn,, Joo-Tae Moon,, Sang-In Lee,Year:
1999
Language:
english
DOI:
10.1109/icvc.1999.820853
File:
PDF, 285 KB
english, 1999