Summary Abstract: Determination of electrical potential as...

Summary Abstract: Determination of electrical potential as a function of position on semi-insulating polycrystalline silicon thin films using a scanning Auger microprobe

Comizzoli, R. B.
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Volume:
5
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.574554
Date:
July, 1987
File:
PDF, 400 KB
english, 1987
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