Bernas ion source modifications for platinum and aluminum...

Bernas ion source modifications for platinum and aluminum ion implantation (abstract)

Medulla, C., Raspagliesi, M.
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Volume:
69
Year:
1998
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1148740
File:
PDF, 275 KB
english, 1998
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