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[IEEE Fifth International Conference on Solid-State and Integrated Circuit Technology-ICSICT'98 - Beijing, China (21-23 Oct. 1998)] 1998 5th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.98EX105) - Discussion on the optical-coupling in silicon optical-type micromechanical sensors
Ding Chun,, Wang Yaqiang,, Wang-Yuelin,, Jin Zhonghe,Year:
1998
Language:
english
DOI:
10.1109/icsict.1998.786542
File:
PDF, 172 KB
english, 1998