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[IEEE 2012 13th Intl. Conf. on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) - Cascais, Portugal (2012.04.16-2012.04.18)] 2012 13th International Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - PZT piezoelectric coefficient extraction by PZT-actuated micro-beam characterization and modeling
Casset, F., Cueff, M., Suhm, A., Le Rhun, G., Abergel, J., Allain, M., Dieppedale, C., Ricart, T., Fanget, S., Renaux, P., Faralli, D., Ancey, P., Devos, A., Defay, E.Year:
2012
Language:
english
DOI:
10.1109/esime.2012.6191704
File:
PDF, 1.03 MB
english, 2012