[IEEE IEEE SOS/SOI Technology Conference - Stateline, NV, USA (3-5 Oct. 1989)] IEEE SOS/SOI Technology Conference - Process technology for 3D-CMOS devices
Buchner, R., van der Wel, W., Haberger, K., Seitz, S., Weber, J., Seegebrecht, P.Year:
1989
Language:
english
DOI:
10.1109/soi.1989.69771
File:
PDF, 115 KB
english, 1989