[IEEE 2009 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Berlin, Germany (2009.05.10-2009.05.12)] 2009 IEEE/SEMI Advanced Semiconductor Manufacturing Conference - Novel method to generate inspection care areas using GDS
HoSung Kang,, MinHo Kim,, KiHo Kim,, SooCheol Lee,, JungA Choi,, YeonHo Pae,, ChangHo Lee,, Lee, ChrisYear:
2009
Language:
english
DOI:
10.1109/asmc.2009.5155944
File:
PDF, 312 KB
english, 2009