Fabrication of complex three-dimensional nanostructures...

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 2010 Vol. 28; Iss. 3

Fabrication of complex three-dimensional nanostructures using focused ion beam and nanomanipulation

Jeon, Jangbae, Floresca, Herman Carlo, Kim, M. J.
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Volume:
28
Year:
2010
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3406134
File:
PDF, 747 KB
english, 2010
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