[IEEE The Fifth International Conference on Advanced Semiconductor Devices and Microsystems, 2004. ASDAM 2004. - Smolenice Castle, Slovakia (Oct. 17-21, 2004)] The Fifth International Conference on Advanced Semiconductor Devices and Microsystems, 2004. ASDAM 2004. - 2-D thermo-mechanical simulation of the membrane MEMS components
Chlpik, J., Drzik, M., Lalinsky, T.Year:
2004
Language:
english
DOI:
10.1109/asdam.2004.1441225
File:
PDF, 873 KB
english, 2004