[IEEE ESSDERC 2007 - 37th European Solid State Device Research Conference - Muenchen, Germany (2007.09.11-2007.09.13)] ESSDERC 2007 - 37th European Solid State Device Research Conference - Band edge NMOS work function for nickel fully-silicided (FUSI) gate obtained by the insertion of novel Y-, Tb-, and Yb-based interlayers
Lim, Andy Eu-Jin, Lee, Rinus T. P., Xin Peng Wang,, Wan Sik Hwang,, Chih-Hang Tung,, Lai, Doreen M. Y., Samudra, Ganesh, Dim-Lee Kwong,, Yee-Chia Yeo,Year:
2007
Language:
english
DOI:
10.1109/essderc.2007.4430916
File:
PDF, 627 KB
english, 2007