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[IEEE IEEE 1987 Ultrasonics Symposium - Denver, Colorado, USA (1987.10.14-1987.10.16)] IEEE 1987 Ultrasonics Symposium - Microscopic Fluctuations in Air Bearings Measured by Novel Piezoelectric Sensors
Yeack-Scranton, C.E.Year:
1987
Language:
english
DOI:
10.1109/ultsym.1987.199015
File:
PDF, 372 KB
english, 1987