Atomic layer deposition of zinc sulfide with Zn(TMHD)2

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2013 Vol. 31; Iss. 1

Atomic layer deposition of zinc sulfide with Zn(TMHD)2

Short, Andrew, Jewell, Leila, Doshay, Sage, Church, Carena, Keiber, Trevor, Bridges, Frank, Carter, Sue, Alers, Glenn
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Volume:
31
Year:
2013
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4769862
File:
PDF, 1.29 MB
english, 2013
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