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[IEEE 2011 IEEE International Integrated Reliability Workshop (IIRW) - South Lake Tahoe, CA, USA (2011.10.16-2011.10.20)] 2011 IEEE International Integrated Reliability Workshop Final Report - Inline process characterization and control for robust BEOL reliability
Ee, Y. C., Ng, W. L., Tan, J. B., Zhang, F., Shao, W., Chua, J. K., Li, H. X., Lin, B. F., Ng, C. W., Ramanathan, E.Year:
2011
Language:
english
DOI:
10.1109/iirw.2011.6142590
File:
PDF, 554 KB
english, 2011