Effect of the stoichiometry of Si-rich silicon nitride thin...

Thin Solid Films 2015 / 04 Vol. 581

Effect of the stoichiometry of Si-rich silicon nitride thin films on their photoluminescence and structural properties

Torchynska, T.V., Casas Espinola, J.L., Vergara Hernandez, E., Khomenkova, L., Delachat, F., Slaoui, A.
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Volume:
581
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2014.11.070
Date:
April, 2015
File:
PDF, 1.01 MB
english, 2015
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