LPV control for a wafer stage: beyond the theoretical...

Control Engineering Practice 2005 Vol. 13; Iss. 2

LPV control for a wafer stage: beyond the theoretical solution

Matthijs Groot Wassink, Marc van de Wal, Carsten Scherer, Okko Bosgra
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Volume:
13
Year:
2005
Language:
english
Pages:
15
DOI:
10.1016/j.conengprac.2004.03.008
File:
PDF, 752 KB
english, 2005
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