Shift scheduling for steppers in the semiconductor wafer...

IIE Transactions 2002 / 02 Vol. 34; Iss. 2

Shift scheduling for steppers in the semiconductor wafer fabrication process

KIM, SOOYOUNG, YEA, SEUNG-HEE, KIM, BOKANG
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Volume:
34
Language:
english
Journal:
IIE Transactions
DOI:
10.1080/07408170208928859
Date:
February, 2002
File:
PDF, 586 KB
english, 2002
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