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Design and Characterization of a 2-DOF MEMS Ultrasonic...

IEEE Electron Device Letters 2013 / 11 Vol. 34; Iss. 11

Design and Characterization of a 2-DOF MEMS Ultrasonic Energy Harvester With Triangular Electrostatic Electrodes

Fowler, Anthony G., Moheimani, S. O. Reza, Behrens, Sam
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Volume:
34
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2013.2282815
Date:
November, 2013
File:
PDF, 1.13 MB
english, 2013
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