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[IEEE Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. - Cannes, France (5-7 May 2003)] Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. - Fabrication comb-drive device by MEMS and electroplating
Chao-Heng Chien,, Shi-Hao Chen,Year:
2003
Language:
english
DOI:
10.1109/dtip.2003.1287069
File:
PDF, 351 KB
english, 2003