Control relevant issues in semiconductor manufacturing:...

Control Engineering Practice 2007 Vol. 15; Iss. 10

Control relevant issues in semiconductor manufacturing: Overview with some new results

An-Jhih Su, Jyh-Cheng Jeng, Hsiao-Ping Huang, Cheng-Ching Yu, Shih-Yu Hung, Ching-Kong Chao
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Volume:
15
Year:
2007
Language:
english
Pages:
12
DOI:
10.1016/j.conengprac.2006.11.003
File:
PDF, 432 KB
english, 2007
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