Managing risk in semiconductor manufacturing: A stochastic predictive control approach
Ascensión Zafra-Cabeza, Miguel A. Ridao, Eduardo F. Camacho, Karl G. Kempf, Daniel E. RiveraVolume:
15
Year:
2007
Language:
english
Pages:
16
DOI:
10.1016/j.conengprac.2006.12.004
File:
PDF, 2.12 MB
english, 2007