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MIMO feed-forward design in wafer scanners using a gradient approximation-based algorithm
Marcel Heertjes, Daan Hennekens, Maarten SteinbuchVolume:
18
Year:
2010
Language:
english
Pages:
12
DOI:
10.1016/j.conengprac.2010.01.006
File:
PDF, 1.25 MB
english, 2010