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Growth of Copper(I) Nitride by ALD Using Copper(II) Hexafluoroacetylacetonate, Water, and Ammonia as Precursors
Törndahl, Tobias, Ottosson, Mikael, Carlsson, Jan-OttoVolume:
153
Year:
2006
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2160427
File:
PDF, 264 KB
english, 2006