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[IRE 1977 International Electron Devices Meeting - ()] 1977 International Electron Devices Meeting - A comparison of electrical and visual alignment test structures for evaluating photomask alignment in integrated circuit manufacturing
Russell, T.J., Leedy, T.F., Mattis, R.L.Year:
1977
Language:
english
DOI:
10.1109/iedm.1977.189142
File:
PDF, 515 KB
english, 1977