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[IEEE International Conference on Advanced Thermal Processing of Semiconductors - Charleston, NC, USA (23-26 Sept. 2003)] 11th IEEE International Conference on Advanced Thermal Processing of Semiconductors. RTP 2003 - In-situ steam generation for shallow trench isolation in sub-100 nm devices
Forstner, H.J.L., Nouri, F., Olsen, C.Year:
2003
Language:
english
DOI:
10.1109/rtp.2003.1249142
File:
PDF, 416 KB
english, 2003