[IEEE 2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) - Xi'an, China (2012.08.29-2012.09.1)] 2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) - Design of a miniature 3-DOF flexure-based mechanism for micro/nano manipulation

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