![](/img/cover-not-exists.png)
(Invited) In Situ Characterization of Plasma-Assisted Pt ALD on W ALD Adhesion Layers with Spectroscopic Ellipsometry
Cavanagh, A. S., Baker, L., Clancey, J. W., Yin, J., Kongkanand, A., Wagner, F. T., George, S. M.Volume:
58
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/05810.0019ecst
Date:
August, 2013
File:
PDF, 230 KB
english, 2013