[IEEE 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems - Tucson, AZ, USA (2008.01.13-2008.01.17)] 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems - Fully monolithic CMOS nickel micromechanical resonator oscillator
Wen-Lung Huang,, Zeying Ren,, Yu-Wei Lin,, Hsien-Yeh Chen,, Lahann, Joerg, Nguyen, Clark T.-C.Year:
2008
Language:
english
DOI:
10.1109/memsys.2008.4443580
File:
PDF, 2.15 MB
english, 2008