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[IEEE 1998 IEEE International SOI Conference Proceedings - Stuart, FL, USA (5-8 Oct. 1998)] 1998 IEEE International SOI Conference Proceedings (Cat No.98CH36199) - Multiple layers of silicon-on-insulator (MLSOI) islands fabrication process and fully-depleted SOI pMOSFETs
Pae, S., Su, T., Denton, J.P., Neudeck, G.W., Stout, J.C., Janes, D.B.Year:
1998
Language:
english
DOI:
10.1109/soi.1998.723079
File:
PDF, 277 KB
english, 1998