[IEEE 2005 15th International Crimean Conference Microwave and Telecommunication Technology - Sevastopol, Crimea, Ukraine (2005.9.12-2005.9.16)] 2005 15th International Crimean Conference Microwave & Telecommunication Technology - IC layout verification method, which considers mismatches between results of lithographical modeling and a real image
Koukharenko, S.N., Volk, S.V., Zayats, A.M., Smimov, A.G.Year:
2005
DOI:
10.1109/crmico.2005.1564989
File:
PDF, 485 KB
2005