Crystallisation of magnetron sputtered amorphous Si...

Philosophical Magazine 2010 / 10 Vol. 90; Iss. 29

Crystallisation of magnetron sputtered amorphous Si 1− x C x films ( x = 1/3) studied by grazing incidence X-ray diffractometry

Gruber, Wolfgang, Hadjiamini Najafabadi, Hessam, Geckle, Udo, Bruns, Michael, Schmidt, Harald
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Volume:
90
Language:
english
Journal:
Philosophical Magazine
DOI:
10.1080/14786435.2010.497474
Date:
October, 2010
File:
PDF, 265 KB
english, 2010
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