Misfit strain of oxygen precipitates in Czochralski silicon studied with energy-dispersive X-ray diffraction
Gröschel, A., Will, J., Bergmann, C., Magerl, A.Volume:
115
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4883998
Date:
June, 2014
File:
PDF, 1.36 MB
english, 2014