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[IEEE 1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ASMC 97 Proceedings - Cambridge, MA, USA (10-12 Sept. 1997)] 1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ASMC 97 Proceedings - Manufacturing implementation of corona oxide silicon (COS) systems for diffusion furnace contamination monitoring
Cosway, R.G., Catmull, K.B., Horner, G., Letherer, B.Year:
1997
Language:
english
DOI:
10.1109/asmc.1997.630714
File:
PDF, 516 KB
english, 1997