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[IEEE 15th Biennial University/Government/Industry Microelectronics Symposium - Boise, ID, USA (30 June-2 July 2003)] Proceedings of the 15th Biennial University/Government/ Industry Microelectronics Symposium (Cat. No.03CH37488) - Manufacturing reliable unlanded vias without CVD barrier layers
Nelson, M.M., Prasad, J., Williams, B.N., Ross, K.A., Florence, D.Year:
2003
Language:
english
DOI:
10.1109/ugim.2003.1225705
File:
PDF, 290 KB
english, 2003