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A Study of Dielectric Relaxation and Capacitance Matching of ${\rm Al}_{2}{\rm O}_{3}/{\rm HfO}_{2}/{\rm Al}_{2}{\rm O}_{3}$ MIM Capacitors
Han, In-Shik, Kwon, Hyuk-Min, Kwon, Sung-Kyu, Choi, Woon-Il, Lim, Su, Kim, Jin-Soo, Kim, Moon-Ho, Ha, Man-Lyun, Lee, Ju-Il, Lee, Hi-DeokVolume:
34
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2013.2279220
Date:
October, 2013
File:
PDF, 477 KB
english, 2013