[IEEE 3rd International Symposium on Power Semiconductor Devices and ICs - Baltimore, MD, USA (22-24 April 1991)] [1991] Proceedings of the 3rd International Symposium on Power Semiconductor Devices and ICs - Partial lifetime control in IGBT by helium irradiation through mask patterns
Akiyama, H., Harada, M., Kondoh, H., Akasaka, Y.Year:
1991
Language:
english
DOI:
10.1109/ispsd.1991.146095
File:
PDF, 305 KB
english, 1991