Exoelectron emission spectroscopy of silicon nitride thin films
Rosenman, G., Naich, M., Molotskii, M., Dechtiar, Yu., Noskov, V.Volume:
80
Year:
2002
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.1469656
File:
PDF, 300 KB
english, 2002