[IEEE 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Kyoto, Japan (2012.03.5-2012.03.8)] 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Reliability prediction of 3C-SiC cantilever beams using dynamic Raman spectroscopy
Dewanto, Raden, Chen, Tao, Cheung, Rebecca, Hu, Zhongxu, Gallacher, Barry, Hedley, JohnYear:
2012
Language:
english
DOI:
10.1109/nems.2012.6196772
File:
PDF, 1.03 MB
english, 2012