![](/img/cover-not-exists.png)
Metal ion implantation using a filtered cathodic vacuum arc
Bilek, M. M. M., Evans, P., Mckenzie, D. R., McCulloch, D. G., Zreiqat, H., Howlett, C. R.Volume:
87
Year:
2000
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.373052
File:
PDF, 527 KB
english, 2000