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[IEEE Microsystems (ASDAM) - Smolenice, Slovakia (2010.10.25-2010.10.27)] The Eighth International Conference on Advanced Semiconductor Devices and Microsystems - Synthesis and doping of zinc-oxide thin films by RF sputtering and ion implantation

Milosavljevic, M., Perusko, D., Milinovic, V., Gaspierik, P., Novotny, I., Tvarozek, V.
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Year:
2010
Language:
english
DOI:
10.1109/asdam.2010.5666336
File:
PDF, 567 KB
english, 2010
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